Water Treatment / Reduction of Environmental Burdens Chlorine Engineers co., ltd.

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Electrolysis Ozone Water / Hydrogen Water Generator

Feature

  • It is possible to use their ozone water and hydrogen water generator together or separately.
  • Two features are realized at minimum cost by making the size compact.
  • It is possible to flexibly adjust the flow level and concentration.

Electrolysis ozone water/hydrogen water generator process

fig: Electrolysis ozone water/hydrogen water generator process

Standard model data

Model Name Ozone water density (mg/L) Amount of ozone water (L/min.) Hydrogen water concentration (mg/L) Flow rate of hydrogen water (L/min.) Dimension (WxDxH mm) Weight (kg) Power capacity (kVA)
POHW-101010-S 10 10 > 1 10 900
x1,000
x1,900		 650 5.4
(3φ AC200V)
POW-201010-S 20 10 > 1 10 900
x1,000
x1,900		 700 11.9
(3φ AC200V)

Utility

  1. Power (confirm voltage and frequency)
  2. Pure water (super pure water at more than 17MΩ/cm. Water temperature is lower than 25 degree. Dissolved O2 gas concentration is less than 500ppb. Content hydrogen peroxide density is less than 50ppb)
  3. Cooling water (23 degree ±3 degree)
  4. Control air (0.5-0.7MPa)
  5. Exhaust duct
  6. Drain line (gravity flow or pump discharge.)

Optional

  1. Ozone water booster unit
  2. Agent injection unit

Type symbol

型式記号サンプル
  1. Electrolysis ozone water generator (POHW)
  2. Ozone density Example: 10mg/L10, 20mg/L20, 60mg/L60
  3. Ozone water flow amount Example: 10L/min.10, 20L/min.20
  4. Ozone water flow amount Example: 10L/min.10, 70L/min.→70
  5. Grade of semiconductor production unit (S)
  6. No symbol→Standard, P→Booster pump is embedded

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