Water Treatment / Reduction of Environmental Burdens Chlorine Engineers co., ltd.

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Electrolysis Ozone Gas Generator

Feature

  • Consistently supply ozone gas at more than 200g/m3(N)
  • Possible to supply dry ozone gas (with dryer)
  • The level of ozone gas generation can be freely adjusted

Usage

Semiconductor production field: For CVD, it is used as an oxidant by mixing with fomentation.

Ozone gas generation process

fig: Ozone gas generation process

Standard model data

Model Name Ozone gas density
(g/m3(N))		 Amount of ozone gas
(g/hr)		 Dimension
(WxDxHmｍ)		 Weight (kg) Power capacity
（kVA）
POG-24-S > 200 > 24 600x800x1,500 250 6.8(3φAC200V)
POG-48-S > 200 > 48 600x800x1,700 350 11.9(3φAC200V)
POG-120-S > 200 > 120 1,200x1,300x2,000 500 18(3φAC200V)

Utility

  1. Power (confirm voltage and frequency)
  2. Pure water (super pure water at more than 2MΩ/cm)
  3. Cooling water (23 degree ±3 degree)
  4. Control air (0.5-0.7MPa)
  5. Heat exhaust duct
  6. Drain line (gravity flow)

Optional

  1. Exhaust ozone gas separator/catalyzer
  2. Ozone gas dryer (dew point lower than -70 degree)
  3. High-pressure ozone gas generation unit (-400kPa)
  4. Environment ozone monitor

Type symbol

型式記号サンプル
  1. Electrolysis ozone gas generator (POG)
  2. Ozone gas generation level (Example: 4g/hr to 04, 48g/hr to 48, 240g/hr to 240)
  3. Grade of semiconductor production unit (S)
  4. No symbol to Standard

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