Water Treatment / Reduction of Environmental Burdens Chlorine Engineers co., ltd.

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Electrolysis Hydrogen Water Generator

Feature

Photo: Electrolysis Hydrogen Water Generator
  • Manufacture clean hydrogen water with super pure water. Saturated hydrogen concentration under atmospheric temperature/pressure
    Achieved less than 1.0mg/L
  • Supply high purity and constant density hydrogen water on site, as necessary
  • Safety design does not support high-pressure gas regulation when the generation pressure is lower than 1MPa
  • Exhaust hydrogen gas degraded catalyzed and the unit is automatically stopped if hydrogen leak is detected by the gas detector
  • It is possible to setup an agent injection pump for ORP, and pH control

Usage

  1. Silicon wafer production field: Planation washing
  2. Semiconductor production field: Wash incoming wafer, washing before film generation, washing after CMP
  3. LCD manufacturing field: Wash incoming glass substrate, washing before film generation
  4. Harddisk manufacturing field: Wash incoming glass substrate, washing before film generation

Electrolysis hydrogen water generator process

fig: Electrolysis hydrogen water generator process

Standard model data

Model Name Hydrogen water concentration (mg/L) Flow rate of hydrogen water (L/min.) Dimension (WxDxH mm) Weight (kg) Power capacity (kVA)
PHW-2700-S > 1 45 500x600x600 120 1.5(1φAC200V)
PHW-3600-S > 1 60 500x600x800 140 3.0(1φAC200V)

Utility

  1. Power (confirm voltage and frequency)
  2. Pure water (super pure water at more than 17MΩ/cm) Water temperature is lower than 25 degree. Diluted oxygen concentration is lower than 500ppb)
  3. Cooling water (23 degree ±3 degree)
  4. Control air (0.5-0.7MPa)
  5. Heat exhaust duct
  6. Drain line (gravity flow)

Optional

  1. Internal agent tank (for alkali)
  2. Internal agent injection pump (for alkali)
  3. Internal automatic agent dilution unit (for alkali)
  4. Automatic agent concentration adjustment unit (for alkali)
  5. Source water drain
  6. Central control system (for high levels of the central control system is a standard unit)

Type symbol

型式記号サンプル
  1. Electrolysis hydrogen water generator (PHW)
  2. Amount of hydrogen water Example: 10L/min.→600L/hr→60
  3. Grade of semiconductor production unit (S)
  4. No symbol→Standard, P→Booster pump is embedded

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